An Innovative Approach to the Design of Fault-Tolerant Process Control Vacuum Deposition of Composite Coatings

On the example of technology vacuum deposition of composite coatings is considered a class of multistage cyclic processes and proposed approach to fault-tolerant control systems. We propose a formalism for the description of the diagnostic signs of failure, taking into account the degree of influence of their impact on the process, formed part of the diagnostic functions of the supervisor level, collecting information on the development and shaping of faults in their components and control actions in the light of current diagnostic blocks and subsystems, process rates, and other factors. The structure of a fault-tolerant control system under consideration process is proposed.

Keywords: technology process, fault, diagnostic feature, fault-tolerant management, supervisor, vacuum unit, composite coatings